The ALS130H linear motor stage provides bi-directional repeatability to 75 nm, and low-velocity performance for testing, measurement and inspection applications. The ALS130H employs a center-driven, non-cogging direct-drive linear motor for ultra-precise motion. A 23 N (5.2 lb) continuous force linear servomotor provides optimum throughput. The high-accuracy, non-contact, glass-scale linear encoder provides in-position stability, and the anti-cage creep cross-roller bearings provide smooth, ripple-free motion for high-precision scanning.
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