The low profile and precise motion capability make these stages useful in semiconductor manufacturing and inspection, automated tool alignment, machine vision inspection systems, laser machining applications, and more. Precision-ground ball screw and moving-wedge design provides high performance. Excellent pitch and yaw characteristics over the length of travel minimize the impact of angular errors. Features exceptional resolution (5 nm) and accuracy (±1 µm), with the ability to apply this performance to large loads up to 135 kg.
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