Aerotech, Inc: Lift stage with large aperture for large, heavy loads

The low profile and precise motion capability make these stages useful in semiconductor manufacturing and inspection, automated tool alignment, machine vision inspection systems, laser machining applications, and more. Precision-ground ball screw and moving-wedge design provides high performance. Excellent pitch and yaw characteristics over the length of travel minimize the impact of angular errors. Features exceptional resolution (5 nm) and accuracy (±1 µm), with the ability to apply this performance to large loads up to 135 kg.