The low profile and precise motion capability make these stages useful
in semiconductor manufacturing and inspection, automated tool alignment,
machine vision inspection systems, laser machining applications, and
more.
Precision-ground ball screw and moving-wedge design provides high
performance. Excellent pitch and yaw characteristics over the length of
travel minimize the impact of angular errors. Features exceptional
resolution (5 nm) and accuracy (±1 µm), with the ability to apply this
performance to large loads up to 135 kg.
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