With its subnanometer resolution, bi-directional repeatability to 75 nm, and excellent low-velocity performance, the solution is suitable for high-performance test, measurement, inspection, and other demanding applications. The unit employs a center-driven, noncogging linear motor as the driving element. Because the motor is a direct-drive device, there is no backlash, windup, or “stiction” normally associated with lead screw or ball-screw drives. The moving-magnet track design eliminates the need for cable management and further improves long-term reliability.
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