TURCK, Inc: MEMS inclinometers

A MEMS  device incorporates a micro-electromechanical capacitive element into the sensor that utilizes 2 parallel plate electrodes, 1 stationary and 1 attached to a spring-mass system. Movement causes acceleration that produces deflection in the non-stationary electrode. This results in a measurable change in the capacitance between the 2 plates that is proportional to the angle of deflection. All measured values and parameters are accessible via the object directory. The micro board design in the MEMS technology provides a compact, precise inclinometer.