The precision-ground ball screw or lead screw provides accuracy and repeatability, with ultra-fine positioning resolution capability of 0.1 micron. The DC servomotor is equipped with a rotary encoder, and the crossed-roller linear bearings provide smooth travel and payload capabilities up to 5 kg with a stage mass of just 0.85 kg. The MPS50SL is available vacuum prepped to 10-6 torr.
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