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Article | September 11, 2013
Aerotech: Linear motor stage
Aerotech’s PlanarDL series of integrated, low-profile, XY, linear-motor stages offers quality geometric performance (straightness to ±0.4 µm; flatness to ±1 µm), and dynamic performance in a compact, low-profile, cost-effective package.
Available in nine different travel and performance configurations, this stage is the designed for applications ranging from high-accuracy surface profilometry to high-speed semiconductor and LED wafer scribing.
The PlanarDL features an optimized structure, components with exacting precision, the company’s own direct-drive motor technology, and an integrated cable management system. The PlanarDL XY design allows for quality planar geometric performance in applications where straightness and flatness of motion are critical. High-precision, anti-creep crossed-roller bearings, precision-machined surfaces and Aerotech linear motors driving through the axes’ center-of-stiffness are said to result in exceptional geometric tolerances.
PlanarDL structural elements are optimized for high-dynamics and high-stiffness for demanding dynamic applications. Capable of achieving 1 m/s velocities and 1.5 g accelerations, the PlanarDL enables high-throughput, high-accuracy processing resulting in a high process yield and a low total cost of ownership. The anti-creep crossed-roller bearings used in this design provide the smooth motion suitable for challenging scanning applications.
PlanarDL noncontact, direct-drive technology offers high-speed and accurate positioning coupled with maintenance-free operation and long service life. Aerotech’s proprietary direct-drive technology is said to provide improved performance compared to other competitive screw-based and linear-motor designs.
The PlanarDL-200XY and -300XY stages are both available with one or two motors per axis, allowing optimization of each individual axis for the specific application and process parameters. Regardless of the number of motors selected, the resulting drive force acts through the centers of friction and stiffness resulting in quality geometric performance and accuracy.
The cable management system on the PlanarDL is integrated into the stage and optimized for long life and performance. Additional standard options are available for extra servo axes or air/vacuum lines for vacuum chucks or other process pneumatics.
The PlanarDL is available in three positioning performance options: -BASE, -PLUS and -ULTRA. High-performance -PLUS and -ULTRA options are available to enable accuracies and straightness values down to ±400 nm and orthogonality down to 1 arc second.
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