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Aerotech, Inc: Noncontact direct-drive Z-axis nanopositioners

Offered in two models--ANT95-L-Z and ANT130-L-Z--and two accuracy grades, Aerotech’s ANT-L-Z crossed-roller, Z-axis, nanopositioning stages combine speed, accuracy, resolution, repeatability, reliability, and size, in a large travel format (25 mm, 35 mm, 50 mm, 60 mm travels), for mass production of precision devices.
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FILED IN:  Controls  > Machine control

Provides high-level positioning performance for high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing, and scanning processes that demand smooth and precise motion.  Features include:  high resolution (2 nm), repeatability (75 nm) and accuracy (300 nm); in-position stability of <2 nm; anti-creep crossed-roller bearings.

ANT-L-Z stages use a nearly frictionless counterbalance mechanism to maintain performance levels while minimizing motor heating. The counterbalance is user-adjustable from 0 to 10 kg, depending on stage model.

The ANT-L-Z family has universal mounting and tabletop patterns that allow for easy system integration. The entire ANT nanopositioner family of linear, rotary, lift, Z-axis, and goniometers can be combined for flexible system designs and multi-axis configurations.

The ANT-L-Z stage’s 2 nm minimum incremental step size provides high-level performance. The in-position stability of less than 2 nm is assisted by high-quality, anti-creep, crossed-roller bearings. These stages offer virtually maintenance-free operation over the life of the product. Features no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.


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